Chamber Capability Checks

At time of attempting to download a run to a chamber, or when running a cycle consistency check, the system will verify chamber capability. Cycle consistency check will fail and the system will not allow downloading the run if an assigned chamber does not meet the defined capabilities. Such a chamber will not be able to run this cycle.

  1. Each pressure set-point and tolerance is within the minimum and maximum chamber pressure capability

  2. Each temperature set-point is within the minimum and maximum chamber temperature capability

  3. If cooling set-point is specified, cooling valve must exist

  4. If RH is specified, AH or RH measurement device must exist

  5. If AH is specified AH measurement device must exist

  6. If weight is specified, weigh scale must exist

  7. If EO concentration is specified, EO measurement device must exist. EO concentration specified in Air Wash and Nitrogen Wash loops do not require EO measurement device.

  8. If EO inject or EO dwell phase are specified, EO block valve must exist

  9. If jacket temp is specified, jacket thermocouples and heat block valve must exist

  10. If chamber temperature is specified, chamber thermocouples and heat block valve must exist

  11. If blower is enabled, blower must exists

  12. If N2 inject, N2 block valves must exist

  13. If product temperature tolerance is specified, product TC must exist

  14. The number of product TC required must exist on the chamber

  15. The capability check for the “% Vacuum Open” parameter 1027 will act as follows:

    1. If no value is specified or the parameter is missing or the value is set to 100%:

      1. No equipment capability check related to vacuum flow valve is performed

    2. A parameter value is specified and it is other than 100%:

      1. Equipment capability check will fail if there is no vacuum flow valve present